Inductively Coupled Etching System

Argonne National Laboratory, operating as a Department of Energy contractor, is seeking an Inductively Coupled Etching System in support of the Q-NEXT program. This procurement, assigned solicitation number 6-S176-Q-00231-00, falls under NAICS 333242 Semiconductor Machinery Manufacturing and PSC 6640 Laboratory Equipment and Supplies. The laboratory intends to issue an award based on the Lowest Price, Technically Acceptable evaluation method, requiring vendors to provide documentation demonstrating that their proposed system meets all technical specifications defined in the April 27, 2026, Statement of Work.

The place of performance for this requirement is in Illinois, with Molly Hunter serving as the point of contact. Responses are due no later than 5:00 p.m. CDT on May 26, 2026. Submissions must include a completed ANL-70 Request for Quotation containing pricing and supporting technical evidence, as well as a completed ANL-70B Representations and Certifications. The solicitation is supported by six attachments, which include the Statement of Work, on-site modification risk documentation, quality assurance procurement requirements, and necessary representation and quotation forms.